Vacuum clamping plates made of glass & ceramic
Our vacuum clamping plates enable dimensionally stable clamping of glass, ceramics, and silicon—manufactured with high precision according to your requirements.
- Custom-made vacuum clamping plates made of technical ceramics or glass
- Customized manufacturing in the µm range
- Prototype and series production
- Short quotation and delivery times, express delivery available on request
- Personal contact with many years of experience
Efficient workpiece clamping for the most demanding requirements by vacuum clamping plates
Conventional clamping systems quickly reach their physical limits when working with brittle or thin-walled materials. Our vacuum clamping plates (vacuum chucks) ensure homogeneous clamping force distribution and provide the basis for reliable machining—whether in semiconductor manufacturing, medical technology, research, or industrial precision machining.
Technical features at a glance
- Custom manufacturing based on drawings or STEP models
- Optimized duct routing for uniform negative pressure
- Selectively polished surfaces possible
- Integration into existing manufacturing processes possible
- Optionally also available with threaded connections or special connection points, etc.
Examples of materials:
- Fused silica
- technical ceramics
- Zerodur
- Silicon carbide
- and many more
Manufacturable geometries:
- Micro holes
- Wells
- Reservoirs
- Complex 3D channels
- Branches
- Threads
- Inlet/outlet ports
- and more
Why ShapeFab?
- Over 27 years of experience in the precision machining of hard, brittle materials
- Innovative combination of grinding, lapping, and polishing technologies on a single CNC machine (details)
- ISO certified, development and manufacturing in Germany
- Personal consultation by our technical experts
- Short quotation and delivery times, express deliveries available on request